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Proceedings Paper

Efficient and reliable design of microsystems
Author(s): Dagmar Peters; Sven Rehfuss; Hilmar Bolte; Oliver Nuessen; Rainer Laur
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Paper Abstract

The way of how an efficient and reliable design strategy for Microsystems should be set up is discussed and put into practice. Within this design strategy automatic design optimization plays a decisive role. The model based design optimization system MODOS is presented which has especially been developed for the development of Microsystems. Finally, the proposed design strategy is utilized to optimize a micro mechanical pressure sensor with integrated readout circuitry.

Paper Details

Date Published: 19 April 2002
PDF: 9 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462819
Show Author Affiliations
Dagmar Peters, Univ. Bremen (Germany)
Sven Rehfuss, Univ. Bremen (Germany)
Hilmar Bolte, Univ. Bremen (Germany)
Oliver Nuessen, Univ. Bremen (Germany)
Rainer Laur, Univ. Bremen (Germany)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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