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Proceedings Paper

Optimization of the planar pellistor using finite element analysis
Author(s): Graeme A. McRobbie; Fraser Clark; Chris Tandy
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Paper Abstract

The planar pellistor is a thin film microsensor used for the detection of inflammable gases. In its simplest, it consists of a metallic meander structure that serves both as a heater for the catalyst and as a temperature sensor. For low power operation thermal insulation between the sensor and the substrate is vital and is achieved by a thin silicon nitride membrane. The optimization of such a structure in terms of the sensor's dimensions is discussed.

Paper Details

Date Published: 19 April 2002
PDF: 8 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462816
Show Author Affiliations
Graeme A. McRobbie, Univ. of Paisley (United Kingdom)
Fraser Clark, Univ. of Paisley (United Kingdom)
Chris Tandy, Gas Measurement Instruments Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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