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Proceedings Paper

Digital compensation technique for the improvement of the comb drive actuator transient response
Author(s): M. S. Mahmoud; Diaa Abdel-Maguid M. Khalil; M. T. El-Hagry; Mohammed A. L. Badr
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Paper Abstract

In this work, we propose a new technique to improve the transient response of the comb drive actuator using a digital compensation technique. This technique is mainly based on the use of a specific digital pulse train that satisfies the equal area criterion on the force displacement diagram of the actuator. Applying this technique to a specific actuator design, we show that it increases the forward displacement without sticking, reduces the overshoot, and improves the speed of response.

Paper Details

Date Published: 19 April 2002
PDF: 12 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462814
Show Author Affiliations
M. S. Mahmoud, National Research Ctr. (Egypt)
Diaa Abdel-Maguid M. Khalil, Ain Shams Univ. and MEMSCAP S.A. (Egypt)
M. T. El-Hagry, National Research Ctr. (Egypt)
Mohammed A. L. Badr, Ain Shams Univ. (Egypt)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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