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Proceedings Paper

Generation of MEMS component models using Cosserat symbolic simulations
Author(s): Richard Rosing; C. Wang; R. W. Tucker; Andrew Richardson; B. De Masi
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Paper Abstract

This paper describes how models of slender MEMS components can be generated using symbolic simulations based on Cosserat theory. Due to the generality of the method, models can be generated for a wide range of components under different stress conditions. The structure of the Cosserat- based models is presented, showing their concise, mathematically accurate representation. This potentially results in faster simulation results than finite element analysis, requiring detailed 3d meshed models. The use of Cosserat models in symbolic simulations enables generation of closed-form expressions for the dynamics of components with complex shapes. The influence of various stress conditions, such as package-induced and residual stress, on the behavior of the component can be included in these expressions.

Paper Details

Date Published: 19 April 2002
PDF: 6 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462805
Show Author Affiliations
Richard Rosing, Lancaster Univ. (United Kingdom)
C. Wang, Lancaster Univ. (United Kingdom)
R. W. Tucker, Lancaster Univ. (United Kingdom)
Andrew Richardson, Lancaster Univ. (United Kingdom)
B. De Masi, STMicroelectronics (Italy)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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