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Proceedings Paper

Influence of process variation on the functionality of a high-pressure sensor
Author(s): Joerg Muchow; Andre Kretschmann; Ralf Henn; Klaus Skrobanek; Stefan Finkbeiner; Hans Reiner Krauss
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Paper Abstract

A sensor designer has to keep in mind a couple of things developing a new product. These are performance, reliability and last but not least cost. Cost is mainly a function of yield. To be successful on the market, it is therefore necessary to predict yield for a new design, based on its process steps. This can be done only by modeling a sensor based on process parameters as input to the models. How to realize this, will be shown for the design of a high pressure sensor.

Paper Details

Date Published: 19 April 2002
PDF: 6 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462804
Show Author Affiliations
Joerg Muchow, Robert Bosch GmbH (Germany)
Andre Kretschmann, Robert Bosch GmbH (Germany)
Ralf Henn, Robert Bosch GmbH (Germany)
Klaus Skrobanek, Robert Bosch GmbH (Germany)
Stefan Finkbeiner, Robert Bosch GmbH (Germany)
Hans Reiner Krauss, Robert Bosch GmbH (Germany)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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