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Proceedings Paper

Trace gas analysis by diode laser cavity ring-down spectroscopy
Author(s): Wen-Bin Yan
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Paper Abstract

A new advanced infrared-based analyzer was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture to less than 200 parts-per- trillion (PPT) and perform single species detection of other ultra trace gas impurities such as NH3, CO, Hcl, HF and CH4 to parts-per-billion (PPB) and sub-PPB concentrations. Trace moisture calibration data will be presented to demonstrate the speed of response, sensitivity and accuracy of infrared Cavity Ring-Down Spectroscopy (CRDS). Emerging broadband capability to measure multiple trace gas species by CRDS technology will also be discussed.

Paper Details

Date Published: 16 April 2002
PDF: 9 pages
Proc. SPIE 4648, Test and Measurement Applications of Optoelectronic Devices, (16 April 2002); doi: 10.1117/12.462654
Show Author Affiliations
Wen-Bin Yan, Tiger Optics, LLC. (United States)


Published in SPIE Proceedings Vol. 4648:
Test and Measurement Applications of Optoelectronic Devices
Niloy K. Dutta; Robert W. Herrick; Aland K. Chin; Niloy K. Dutta; Robert W. Herrick; Kurt J. Linden; Daniel J. McGraw, Editor(s)

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