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Proceedings Paper

Optical properties of porous fluoride coating for UV and DUV lasers
Author(s): K. Yoshida; M. Ohya; K. Hatooka; Kanyoshi Ochi; M. Sunagawa; Tomosumi Kamimura
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Paper Abstract

Laser-induced damage of thin films coated on optical components used for UV and DUV lasers are serious problems. Gradient refractive index antireflection films are produced by the combination of evaporation and leaching process on fused silica substrate. It has a high laser-induced damage threshold of 7.4-8.7 J/cm2 at 266 nm. The reflectance is about 0.35%.

Paper Details

Date Published: 9 April 2002
PDF: 6 pages
Proc. SPIE 4679, Laser-Induced Damage in Optical Materials: 2001, (9 April 2002); doi: 10.1117/12.461692
Show Author Affiliations
K. Yoshida, Osaka Institute of Technology (Japan)
M. Ohya, Osaka Institute of Technology (Japan)
K. Hatooka, Osaka Institute of Technology (Japan)
Kanyoshi Ochi, Osaka Institute of Technology (Japan)
M. Sunagawa, S-Vac Co. (Japan)
Tomosumi Kamimura, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 4679:
Laser-Induced Damage in Optical Materials: 2001
Gregory J. Exarhos; Arthur H. Guenther; Keith L. Lewis; M. J. Soileau; Christopher J. Stolz, Editor(s)

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