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Proceedings Paper

Integrated optics sensor on silicon for the measurement of displacement, force, and refractive index
Author(s): Gerd Ulbers
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Paper Abstract

For high-precision dimensional measurement, the use of an optical interferometer is often a suitable method. A Michelson interferometer is interesting because of its simple construction. However, to detect the direction of a movement the interferometer has to be modified. Two solutions are possible: first, a double Michelson interferometer made using integrated optics technology on silicon is presented; second, a homodyne modulation and demodulation technique for a single Michelson interferometer on silicon is presented. An analysis of the performance of the both solutions is described. The interferometer developed is very small and low in price compared to the present technology. Many applications of this interferometer are possible; the measurement of displacement, force, and refractive index are presented as examples.

Paper Details

Date Published: 1 August 1991
PDF: 12 pages
Proc. SPIE 1506, Micro-Optics II, (1 August 1991); doi: 10.1117/12.45963
Show Author Affiliations
Gerd Ulbers, Hommelwerke Sensor GmbH (Switzerland)

Published in SPIE Proceedings Vol. 1506:
Micro-Optics II
Anna Maria Verga Scheggi, Editor(s)

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