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Proceedings Paper

Production and loss of CF2 and CF radicals at the polymerization in CF4 plasma
Author(s): V. V. Ivanov; K. S. Klopovskiy; D. V. Lopaev; O. V. Proshina; Alexander T. Rakhimov; T. V. Rakhimova; G. B. Rulev
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Paper Details

Date Published: 19 March 2002
PDF: 16 pages
Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); doi: 10.1117/12.459417
Show Author Affiliations
V. V. Ivanov, Moscow State Univ. (Russia)
K. S. Klopovskiy, Moscow State Univ. (Russia)
D. V. Lopaev, Moscow State Univ. (Russia)
O. V. Proshina, Moscow State Univ. (Russia)
Alexander T. Rakhimov, Moscow State Univ. (Russia)
T. V. Rakhimova, Moscow State Univ. (Russia)
G. B. Rulev, Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 4460:
Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures

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