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Production of N, O, and H atoms in flowing molecular discharges
Author(s): A. Ricard; V. Monna; M. Gaillard; J. P. Sarrette; M. Mozetic
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Paper Abstract

Densities of N, O and H atoms have been determined by NO titration in Ar-N2 and Ar-O2 and by a Ni catalytic probe in Ar-02 and Ar-H2 flowing DC and microwave post-discharges. For similar discharge parameters : tube diameter of 6 mm, gas flow rate of about 1N1 min-1 and pressure of 2-3 Torr, it is found higher densities of N and 0 atoms in the microwave post-discharge than in the D.C. one. About the same values of 0 atom density are obtained by NO titration and by the Ni catalytic probe. Spatial distribution of the atomic species was found homogeneous in the post discharge reactor by the use of a three dimensional hydrodynamic and kinetic model. Absolute densities of H atoms have been obtained in pure H2 post-discharge by the Ni probe.

Paper Details

Date Published: 19 March 2002
PDF: 9 pages
Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); doi: 10.1117/12.459411
Show Author Affiliations
A. Ricard, Univ. Paul Sabatier (France)
V. Monna, Univ. Paul Sabatier (France)
M. Gaillard, Univ. Paul Sabatier (France)
J. P. Sarrette, Univ. Paul Sabatier (France)
M. Mozetic, Institute of Surface Engineering and Optoelectronics (Slovenia)

Published in SPIE Proceedings Vol. 4460:
Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures
Vladimir N. Ochkin, Editor(s)

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