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Proceedings Paper

Spectroscopical investigation of plasma parameters in a RF alpha-discharge CO2+N2+He gas mixtures
Author(s): V. V. Azharonok; I. I. Filatova; V. D. Shimanovich; L. N. Orlov; J. I. Necrashevich
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Paper Abstract

The spectroscopic parameters of transversal RF discharge in gas mixtures CO2 +N2 + He are investigated. It has been observed that the width of the shields in a capacity RF discharge in such mixtures is almost independent on the frequency of RF field; it sufficiently differs from the theoretical predictions. The spatial distribution of the neutral gas temperature in various gas mixtures has been measured and discussed. The influence of the small additives of water vapour on luminescence intensity and its spatial distribution is also discussed.

Paper Details

Date Published: 19 March 2002
PDF: 12 pages
Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); doi: 10.1117/12.459407
Show Author Affiliations
V. V. Azharonok, Institute of Molecular and Atomic Physics (Belarus)
I. I. Filatova, Institute of Molecular and Atomic Physics (Belarus)
V. D. Shimanovich, Institute of Molecular and Atomic Physics (Belarus)
L. N. Orlov, Institute of Physics (Belarus)
J. I. Necrashevich, Institute of Physics (Belarus)


Published in SPIE Proceedings Vol. 4460:
Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures
Vladimir N. Ochkin, Editor(s)

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