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Proceedings Paper

Spectroscopy, actinometry, and simulation of a DC discharge in CO/H2 gas mixtures
Author(s): Anatolii V. Filippov; Yuri A. Mankelevich; Alexander F. Pal; Alexander T. Rakhimov; Alexander O. Serov; Nikolay V. Suetin
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Paper Abstract

We have studied the gas heating and dissociation processes in the direct current (DC) discharge CVD reactor with the closed gas circuit where the working gas mixture is used repeatedly by circulation through the discharge area. Experiments were carried out in mixtures of CO with hydrogen at overall gas pressure of 20 kPa and gas flow up to 40 m/s. The discharge plasma was analyzed by actinometry and optical emission spectroscopy. Twodimensional model of DC discharge CVD reactor has been used to study reactive gas flow, electrodynamics and surface processes. The 2D calculations show that the most important radical production reactions are the CO and H2 dissociation due to electron impact. Calculated results are compared with the experimental ones.

Paper Details

Date Published: 19 March 2002
PDF: 11 pages
Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); doi: 10.1117/12.459406
Show Author Affiliations
Anatolii V. Filippov, Troitsk Institute for Innovation and Fusion Research (Russia)
Yuri A. Mankelevich, Moscow State Univ. (Russia)
Alexander F. Pal, Troitsk Institute for Innovation and Fusion Research (Russia)
Alexander T. Rakhimov, Moscow State Univ. (Russia)
Alexander O. Serov, Moscow State Univ. (Russia)
Nikolay V. Suetin, Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 4460:
Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures
Vladimir N. Ochkin, Editor(s)

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