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Proceedings Paper

Laser Thomson scattering diagnostics of nonequilibrium high-pressure plasmas as applied to excimer laser pumping and plasma display
Author(s): Katsunori Muraoka; Mitsuo Maeda; K. Uchino; Y. Noguchi
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Paper Abstract

Laser Thomson scattering (LTS) has been applied to measure electron density and temperature, or more generally electron energy distribution function (eedf), of non-equilibrium high pressure plasmas used for excimer laser pumping and plasma display panel. These quantities, with very high spatial and temporal resolutions and without plasma perturbation, are not obtainable by other means.

Paper Details

Date Published: 19 March 2002
PDF: 9 pages
Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); doi: 10.1117/12.459401
Show Author Affiliations
Katsunori Muraoka, Kyushu Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)
K. Uchino, Kyushu Univ. (Japan)
Y. Noguchi, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 4460:
Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures
Vladimir N. Ochkin, Editor(s)

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