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Proceedings Paper

Voxel shapes in two-photon microfabrication
Author(s): Robert J. DeVoe; Harvey W. Kalweit; Catherine A. Leatherdale; Todd R. Williams
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Paper Abstract

Maximization of scan speed and throughput while maintaining resolution is critical for commercialization of two-photon microfabrication technology. We report contrast curves for cationic and free radical two-photon polymerization. An unusual relationship between voxel shape and dose is observed where the voxel ranges from highly asymmetric (aspect ratio of 4:1 or greater) at high dose to nearly spherical low dose (aspect ratio 1:1 or lower). Similar behavior is observed for both types of polymerization systems suggesting that the change is aspect ratio is not a function of the specific type of chemistry. It is found that a simple optical model describing the intensity distribution near the focal point can predict the change in aspect ratio.

Paper Details

Date Published: 14 February 2003
PDF: 7 pages
Proc. SPIE 4797, Multiphoton Absorption and Nonlinear Transmission Processes: Materials, Theory, and Applications, (14 February 2003); doi: 10.1117/12.459028
Show Author Affiliations
Robert J. DeVoe, 3M Co. (United States)
Harvey W. Kalweit, 3M Co. (United States)
Catherine A. Leatherdale, 3M Co. (United States)
Todd R. Williams, 3M Co. (United States)


Published in SPIE Proceedings Vol. 4797:
Multiphoton Absorption and Nonlinear Transmission Processes: Materials, Theory, and Applications
A. Todd Yeates; Kevin D. Belfield; Stephen J. Caracci; Christopher M. Lawson; Francois Kajzar; A. Todd Yeates; Kevin D. Belfield; Stephen J. Caracci, Editor(s)

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