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Proceedings Paper

Micro-deformable mirror for next-generation adaptive optical systems
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Paper Abstract

Next generation giant telescopes as well as next generation instrumentation for 10m-class telescopes relies on the availability of highly performing adaptive optical systems. Different types of AO systems are currently under study, including Multi-Conjugate AO (MCAO), high dynamic range AO, and low-order AO for distributed partial correction AO. These systems require a large variety of deformable mirrors with very challenging parameters. The development of new technologies based on micro-opto-electro-mechanical systems (MOEMS) is promising for future deformable mirrors. The major advantages of the micro-deformable mirrors (MDM) are their compactness, scalability, and specific task customization using elementary building blocks. We are currently developing a MDM based on an array of electrostatic actuators with attachments to a continuous mirror on top. A high optical quality mirror is the most challenging building block for this device. The originality of our approach lies in the elaboration of a sacrificial layer and of a structural layer made of polymer materials. With this structure, very efficient planarization has been obtained: the long-distance flatness is below 0.2 μm, the print-through of localized 9μm steps is reduced to below 0.5μm and a rms roughness of 15 nm has been measured over the surface. The integration of this mirror surface on top of an actuator array is under investigation.

Paper Details

Date Published: 7 February 2003
PDF: 10 pages
Proc. SPIE 4839, Adaptive Optical System Technologies II, (7 February 2003); doi: 10.1117/12.458845
Show Author Affiliations
Frederic Zamkotsian, Lab. d'Astrophysique de Marseille (France)
Henri Camon, Lab. d'Analyse et d'Architecture des Systemes (France)
Norbert Fabre, Lab. d'Analyse et d'Architecture de Systemes (France)
Veronique Conedera, Lab. d'Analyse et d'Architecture des Systemes (France)
Gabriel Moreaux, Lab. d'Astrophysique de Marseille (France)

Published in SPIE Proceedings Vol. 4839:
Adaptive Optical System Technologies II
Peter L. Wizinowich; Domenico Bonaccini, Editor(s)

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