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Proceedings Paper

Hierarchical GDSII-based fracturing and job deck system
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Paper Abstract

We describe a mask data preparation (MDP) flow using GDSII data. We describe why this flow is minimally disruptive, flexible, and efficient. The mask floor-planning composition can be stored in GDSII so that all layout data is in the same format. We describe how GDSII data can be hierarchically fractured. We use a technique involving the optimal determination of 'cover cells'. Use of cover cell placements allows a large reduction in runtime and data volume. In one case, we fractured a very large design with assist bars and OPC to a 28 GB MEBES mode 5 file. After application of cover cells, the same data fractures to roughly 360 MB -- a reduction of more than 75x.

Paper Details

Date Published: 11 March 2002
PDF: 9 pages
Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); doi: 10.1117/12.458356
Show Author Affiliations
Nicolas B. Cobb, Mentor Graphics (United States)
Emile Y. Sahouria, Mentor Graphics (United States)

Published in SPIE Proceedings Vol. 4562:
21st Annual BACUS Symposium on Photomask Technology
Giang T. Dao; Brian J. Grenon, Editor(s)

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