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Proceedings Paper

Application of automatic parallel fracturing system on hierarchical and large data structure
Author(s): Eiji Tsujimoto; Takahiro Watanabe; Keitaro Katabuchi; Akihiro Nogami; Shuji Shibayama; Hirokazu Sambayashi; Shozo Takaku; Norihiko Takase
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Paper Abstract

TO enable efficient transformation of layout data to Electron Beam lithography drawing data in production, we have developed an automatic parallel-processing fracturing system named Tribune. Tribune can effectively use both parallel and hierarchical processing together to maximize the fracturing performance to easily handle large amounts of layout data. Tribune is designed to effectively use both parallel and hierarchical methods with the aid of cell information known by layout designers. A new fracturing algorithm is employed which fractures patterns whose width is wider than specified critical dimensions to minimize the number of tiny geometries for the improvement of pattern fidelity.

Paper Details

Date Published: 11 March 2002
PDF: 10 pages
Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); doi: 10.1117/12.458351
Show Author Affiliations
Eiji Tsujimoto, Hitachi, Ltd. (Japan)
Takahiro Watanabe, Hitachi, Ltd. (Japan)
Keitaro Katabuchi, Hitachi, Ltd. (Japan)
Akihiro Nogami, Hitachi ULSI Systems Co., Ltd. (Japan)
Shuji Shibayama, Hitachi ULSI Systems Co., Ltd. (Japan)
Hirokazu Sambayashi, Hitachi ULSI Systems Co., Ltd. (Japan)
Shozo Takaku, Hitachi ULSI Systems Co., Ltd. (Japan)
Norihiko Takase, Hitachi ULSI Systems Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 4562:
21st Annual BACUS Symposium on Photomask Technology
Giang T. Dao; Brian J. Grenon, Editor(s)

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