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Proceedings Paper

Development of refined cleaning technique focusing on ecological viewpoint
Author(s): Koji Tange; Yoshikazu Nagamura; Kunihiro Hosono; Yuki Oomasa; Koichi Kido; Atsushi Hayashi; Yasutaka Kikuchi; Ichiro Imagawa; Yuichi Matsuzawa; Hozumi Usui
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Paper Details

Date Published: 11 March 2002
PDF: 12 pages
Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); doi: 10.1117/12.458332
Show Author Affiliations
Koji Tange, Mitsubishi Electric Corp. (Japan)
Yoshikazu Nagamura, Mitsubishi Electric Corp. (Japan)
Kunihiro Hosono, Mitsubishi Electric Corp. (Japan)
Yuki Oomasa, Toppan Printing Co., Ltd. (Japan)
Koichi Kido, Toppan Printing Co., Ltd. (Japan)
Atsushi Hayashi, Toppan Printing Co., Ltd. (Japan)
Yasutaka Kikuchi, Toppan Printing Co., Ltd. (Japan)
Ichiro Imagawa, Toppan Printing Co., Ltd. (Japan)
Yuichi Matsuzawa, Toppan Printing Co., Ltd. (Japan)
Hozumi Usui, WACOM Electric Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 4562:
21st Annual BACUS Symposium on Photomask Technology
Giang T. Dao; Brian J. Grenon, Editor(s)

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