Share Email Print

Proceedings Paper

Room temperature ethanol sensors based on SnO2 films
Author(s): Armen P. Hakhoyan; Vladimir M. Aroutiounian; Zaven N. Adamian; Robert S. Barseghian; Tigran Dolukhanian
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The results presented in this paper demonstrate the possibility of using tin dioxide films as sensitive elements for alcohol sensors. The tin dioxide films were deposited by the spray pyrolysis method on alumina substrates as well as on n+ porous silicon upper layer of silicon diode structures. Room temperature, under atmospheric pressure measurements of the parameters of the obtained structures revealed their high sensitivity to the mixture of ethyl alcohol vapors and air. The optimum concentration of precursor solution for precipitation of tin dioxide films and technological regimes for the deposition of tin dioxide films and formation of a porous silicon layer with appropriate thickness and porosity by electrochemical anodization were found.

Paper Details

Date Published: 22 February 2002
PDF: 10 pages
Proc. SPIE 4576, Advanced Environmental Sensing Technology II, (22 February 2002); doi: 10.1117/12.456962
Show Author Affiliations
Armen P. Hakhoyan, Yerevan State Univ. (Armenia)
Vladimir M. Aroutiounian, Yerevan State Univ. (Armenia)
Zaven N. Adamian, Yerevan State Univ. (Armenia)
Robert S. Barseghian, Yerevan State Univ. (Armenia)
Tigran Dolukhanian, Univ. of Massachusetts/Lowell (United States)

Published in SPIE Proceedings Vol. 4576:
Advanced Environmental Sensing Technology II
Tuan Vo-Dinh; Stephanus Buettgenbach, Editor(s)

© SPIE. Terms of Use
Back to Top