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Proceedings Paper

Highly reliable high-power 266-nm all-solid-state UV laser
Author(s): Tetsuo Kojima; Susumu Konno; Shuichi Fujikawa; Masaki Seguchi; Yushi Takenaka; Koji Yasui; Tomosumi Kamimura; Masashi Yoshimura; Yusuke Mori; Takatomo Sasaki; Mitsuhiro Tanaka; Yukikatsu Okada
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Paper Abstract

We obtained the 266nm UV power of 23W by fourth-harmonic generation using a high-brightness high-power all-solid- state green laser and a high-quality CLBO crystal. This value is, to our knowledge, the highest UV power below 300nm wavelength. Moreover, the UV-power variation was negligibly small by using high-crystal CLBO crystals.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456902
Show Author Affiliations
Tetsuo Kojima, Mitsubishi Electric Corp. (Japan)
Susumu Konno, Mitsubishi Electric Corp. (Japan)
Shuichi Fujikawa, Mitsubishi Electric Corp. (Japan)
Masaki Seguchi, Mitsubishi Electric Corp. (Japan)
Yushi Takenaka, Mitsubishi Electric Corp. (Japan)
Koji Yasui, Mitsubishi Electric Corp. (Japan)
Tomosumi Kamimura, Osaka Univ. (Japan)
Masashi Yoshimura, Osaka Univ. (Japan)
Yusuke Mori, Osaka Univ. (Japan)
Takatomo Sasaki, Osaka Univ. (Japan)
Mitsuhiro Tanaka, Kogakugiken Co., Ltd. (Japan)
Yukikatsu Okada, Kogakugiken Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication

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