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Proceedings Paper

Laser microfabrication: present to future applications
Author(s): Gnian Cher Lim; Tuan-Anh Mai
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Paper Abstract

Product miniaturization and component intricacies require advanced processing technologies to satisfy functionality and quality requirements. Various micro-machining technologies have been under extensive development so as to be able to fill this niche. In particular, the development of MEMS devices utilizes machining methods that include silicon fabrication and LIGA technologies. Lasers present an alternative or supplementary tool for micro-fabrication. Present advances in laser system design are bringing about great improvements in beam quality, increase in high peak power, increase in high pulse energy, and shorten pulse width. This enables direct machining of a wide variety of materials with feature sizes down to the order of micrometers. This paper presents some of the recent developments in utilizing laser to micro-machine or micro-fabricate micro- features on devices. Many of these processes are being used in production, or are expected to be commercially feasible.

Paper Details

Date Published: 25 February 2002
PDF: 7 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456898
Show Author Affiliations
Gnian Cher Lim, Gintic Institute of Manufacturing Technology (Singapore)
Tuan-Anh Mai, Gintic Institute of Manufacturing Technology (Singapore)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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