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Proceedings Paper

Comparison of machining strategies for ceramics using frequency-converted Nd:YAG and excimer lasers
Author(s): Hans Kurt Toenshoff; Andreas Ostendorf; Klaus Koerber; Klaus Meyer
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Paper Abstract

This paper compares the machining strategies for ceramics using a frequency converted (3(omega) ) Nd:YAG laser and a KrF excimer laser. In respect to the substantially different beam characteristics of these lasers, it is also a comparison of laser structuring methods using a focusing or an imaging optical system. The presentation concentrates on the quality of the machined structures and on the processing time of micro cutting and drilling with these two laser systems. An innovative approach for the manufacturing of micro holes, based on a newly developed mask technology, is presented for the first time.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456888
Show Author Affiliations
Hans Kurt Toenshoff, Laser Zentrum Hannover e.V. (Germany)
Andreas Ostendorf, Laser Zentrum Hannover e.V. (Germany)
Klaus Koerber, Laser Zentrum Hannover e.V. (Germany)
Klaus Meyer, Laser Zentrum Hannover e.V. (Germany)


Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication

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