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Proceedings Paper

Pulsed laser deposition of ceramics and diamond-like carbon on PMMA for tribological applications
Author(s): Georg Schlaghecken; Yibran Perera; Ernst-Wolfgang Kreutz; Reinhart Poprawe
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Paper Abstract

The thin films (thickness 400 nm-3micrometers ) were deposited by Pulsed Laser Deposition (KrF-Excimer laser, (lambda) equals248nm, (tau) equals25ns) with variation of the processing parameters gas pressure, target-to-substrate- distance and laser fluence on the target. Polymethyl methacrylate (PMMA) was chosen as substrate material and the selected coating materials are alumina (formula available in paper) and diamond-like-carbon (DLC). The focus in this work is on the adherence of the coatings. Therefore, different pretreatments of the PMMA substrates like plasma processing, deposition of titanium buffer layer, mechanical and chemical surface modification were performed. The hardness and the elastic modulus of the films are measured by nano- indentation. The thickness of the ceramic deposited films are determined by ellipsometry. X-ray photoemission spectroscopy, optical and electron microscopy are used for the determination of the structural and chemical characteristics of the films.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456878
Show Author Affiliations
Georg Schlaghecken, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)
Yibran Perera, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)
Ernst-Wolfgang Kreutz, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)
Reinhart Poprawe, Rheinische-Westfaelische Technische Hochschule Aachen (Germany)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication

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