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Proceedings Paper

Morphological characterization of various kinds of materials in femtosecond laser micromachining
Author(s): Kosuke Kawahara; Yasunobu Kurogi; Naoyuki Matsuo; Hiroshi Sawada; Atsushi Yokotani; Kou Kurosawa
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Paper Abstract

We are developing applications of femtosecond-laser ablation to the practical material processing such as cutting, drilling, dicing and turning. In this work, we have observed the morphology of ablation traces formed on the surfaces of various materials to investigate the influence of physical properties of work materials on the machining preciseness. Ti:sapphire laser pulses ((lambda) equals 790 nm, (tau) equals 160fs, f equals 10 Hz, E equals 0.6 ~ 1.2 mJ/pulse) were focused on the samples, insulators (silica glass and PMMA), semiconductor (Si), and metals (Cu and Al), fixed on a PC- controlled X-Y stage and moved one-dimensionally at a scan rate of 5.5 ~111 micrometers /sec. Grooves with well-defined edge were observed on the insulators which have low thermal conductivity. In the case of the metallic materials having relatively high thermal conductivity, molten walls were observed near the edge of the grooves. It is considered that mainly thermal conductivity plays an important role in characteristics of the ablation morphology.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456876
Show Author Affiliations
Kosuke Kawahara, Miyazaki Univ. (Japan)
Yasunobu Kurogi, Miyazaki Univ. (Japan)
Naoyuki Matsuo, Miyazaki Univ. (Japan)
Hiroshi Sawada, NEC Machinery Corp. (Japan)
Atsushi Yokotani, Miyazaki Univ. (Japan)
Kou Kurosawa, Miyazaki Univ. (Japan)


Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication

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