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Proceedings Paper

Fabrication of microlenses and microlens arrays using local melting of glass plate by CO2 laser
Author(s): Moriaki Wakaki; Yuichi Komachi; Genichi Kanai; Hideo Fukumoto; Shuichi Kawabata
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Paper Abstract

Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO2 laser. By heating the surface of a glass plate locally to a working point of the glass material using CO2 laser beam, the surface became a hyperboloid owing to surface tension, which resulted in microlens. This method has the merit of complete dry processing. Several types of glass materials were tested. It is important to choose the type of glass with thermostable property with small expansion coefficient. It was found possible to make easily microlens and arrays with different focus lengths by controlling a laser power and a irradiated position. Typically, a CO2 laser power of 1.5W and an irradiation time of 1.1s were used to fabricate a microlens with a 170 micrometers diameter and 181 micrometers focal length with good focusing property. Microlenses fabricated using various beam profiles of CO2 laser were also discussed.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456867
Show Author Affiliations
Moriaki Wakaki, Tokai Univ. (Japan)
Yuichi Komachi, Machida Endoscope Co., Ltd. (Japan)
Genichi Kanai, Machida Endoscope Co., Ltd. (Japan)
Hideo Fukumoto, Tokai Univ. (Japan)
Shuichi Kawabata, Tokyo Institute of Polytechnics (Japan)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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