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Proceedings Paper

Particle-enhanced near-field optical effect and laser writing for nanostructure fabrication
Author(s): Yongfeng Lu; L. Zhang; Wen Dong Song; Yuan Wei Zheng; Boris S. Luk'yanchuk
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Paper Abstract

In this paper, we present a novel method of nanostructure fabrication using particle-enhanced near-field optical effect and lasers. For this purpose, spherical silica particles were deposited on a silicon surface. After laser illumination, hillocks with size of about 150 nm were obtained at the original position of the particles. The mechanism can be explained as the enhancement of light intensity near the contact area. Since the characteristic distance between particles and substrate is smaller than the radiation wavelength and the particle size is of the order of a wavelength, particle does not simply play the role of microfocusing lens as in far-field, but possess optical resonance effect in near-field. In our work, the light intensity on the surface under the spherical particle was calculated by solving the electromagnetic boundary problem 'particle on surface.'

Paper Details

Date Published: 25 February 2002
PDF: 3 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456865
Show Author Affiliations
Yongfeng Lu, Data Storage Institute (United States)
L. Zhang, Data Storage Institute (Singapore)
Wen Dong Song, Data Storage Institute (Singapore)
Yuan Wei Zheng, Data Storage Institute (Singapore)
Boris S. Luk'yanchuk, Data Storage Institute (Singapore)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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