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Proceedings Paper

Laser thinning of the thickness of a-GeS2 films
Author(s): Shuichi Kawabata; Yoshihisa Murakami; Yasunori Ozawa; Moriaki Wakaki
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Paper Abstract

The amorphous GeS2 film is one of the chalcogenide glass and also shows the phenomenon of Ag-photodoping under the illumination of the high-pressure mercury lamp. We have been carrying out the in-situ measurements of the photodoping process of Ag/a-GeS2 films system with a laser probe ellipsometer. In the process of the thickness measurements, we have observed curious changes of ellipsometric parameters (delta) and (Psi) of the GeS2 film sample during the illumination of the laser probe. The results seem to be suggesting that the illumination of the laser beam might engrave the GeS2 film. The power of the laser is less than 1mW and the beam diameter is 1mm. The idea such as an ablation of the GeS2 film seems to be unlikely to interpret this phenomenon.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456864
Show Author Affiliations
Shuichi Kawabata, Tokyo Institute of Polytechnics (Japan)
Yoshihisa Murakami, Tsukuba College of Technology (Japan)
Yasunori Ozawa, Tokai Univ. (Japan)
Moriaki Wakaki, Tokai Univ. (Japan)


Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication

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