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Proceedings Paper

Laser micromachining for Ag ion exchanged glasses
Author(s): Tadashi Koyama; Keiji Tsunetomo; Kenji Kamada; Kenichi Nakama
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Paper Abstract

Machining properties of Ag containing glasses (ACG) using KrF excimer laser and femtosecond laser are reported. Ag ions in the ACG are effective to prevent cracking and chipping during the laser machining. A 4x4 hole array fabricated by KrF excimer laser onto an ACG has good uniformity of hole diameter, d(ave) equals 129.9um and (sigma) equals 0.8um. V- and U- grooves are fabricated on ACG using a Ti:Al2O3 laser irradiation. The cross- sectional shape is controlled by Ag ion concentration in ACG.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456857
Show Author Affiliations
Tadashi Koyama, Nippon Sheet Glass Co., Ltd. (Japan)
Keiji Tsunetomo, Nippon Sheet Glass Co., Ltd. (Japan)
Kenji Kamada, Photonics Research Institute (Japan)
Kenichi Nakama, Tsukuba Research Ctr. (Japan)


Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication

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