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Proceedings Paper

Composition and structure of BCN films prepared by ion beam-assisted pulsed laser deposition
Author(s): Hao Ling; Zhifeng Ying; JiaDa Wu; Jian Sun; Wei Shi; Yuancheng Du; Fuming Li
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Paper Abstract

We report on the preparation of boron carbon nitride (BCN) thin films by pulsed laser ablation of a sintered B4C target and the compositional and structural characterization of the films. The film preparation was performed with assistance of nitrogen ion beam from a Kaufman source. X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (FTIR) were used for compositional analysis and structural characterization. The results showed that the prepared films contain several chemical bonds such as B-N and C-N. The BCN films were found to show good adhesion to the substrates and have a high transparency from visible to near-infrared region. WE also grew films in nitrogen background without ion beam assistance and in vacuum. The atomic ratio of boron, carbon and nitrogen and the chemical bonds are strongly dependent on the deposition conditions. The ion beam assistance, i.e. the reactive nitrogen environment and the bombardment of the growing films by the energetic species in the nitrogen ion beam, is beneficial to the incorporation of nitrogen.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456842
Show Author Affiliations
Hao Ling, Fudan Univ. (China)
Zhifeng Ying, Fudan Univ. (China)
JiaDa Wu, Fudan Univ. (China)
Jian Sun, Fudan Univ. (China)
Wei Shi, Fudan Univ. (China)
Yuancheng Du, Fudan Univ. (China)
Fuming Li, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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