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Proceedings Paper

Laser cleaning technology and its application
Author(s): Wen Dong Song; Minghui Hong; L. Zhang; Yongfeng Lu; Tow Chong Chong
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Paper Abstract

Laser cleaning technology has been demonstrated to be an effective cleaning technique for removing particulate and film-type contaminants from solid surfaces in this paper. Dry and steam laser cleaning mechanisms and applications in semiconductor and disk drive industry will be addressed.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456839
Show Author Affiliations
Wen Dong Song, Data Storage Institute (Singapore)
Minghui Hong, Data Storage Institute (Singapore)
L. Zhang, Data Storage Institute (Singapore)
Yongfeng Lu, Data Storage Institute (United States)
Tow Chong Chong, Data Storage Institute (Singapore)


Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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