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Proceedings Paper

Laser-induced surface cleaning from diamond particles
Author(s): Vitali I. Konov; V. V. Kononenko; A. M. Lomonosov; V. G. Mihalevich; Sergej M. Pimenov; K. V. Zhuk
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Paper Abstract

Kr-laser removal of micro and nano sized diamond particles deposited on Si substrates from alcohol solution in an ultrasonic bath has been investigated. The process control was performed ex situ by optical microscopy and in situ by measurements of the acoustic signals in the substrate and in the surrounding air. Optimal cleaning conditions as well as substrate surface damage threshold were found. The mechanism of diamond particles laser removal process was studied.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456829
Show Author Affiliations
Vitali I. Konov, General Physics Institute (Russia)
V. V. Kononenko, General Physics Institute (Russia)
A. M. Lomonosov, General Physics Institute (Russia)
V. G. Mihalevich, General Physics Institute (Russia)
Sergej M. Pimenov, General Physics Institute (Russia)
K. V. Zhuk, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication

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