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Proceedings Paper

Optical near-field effects in surface nanostructuring and laser cleaning
Author(s): H.-J. Muenzer; Mario Mosbacher; M. Bertsch; Oliver Dubbers; F. Burmeister; A. Pack; Reinhold Wannemacher; B.-U. Runge; Dieter Baeuerle; Johannes Boneberg; Paul Leiderer
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Paper Abstract

We present a method for directly imaging the undisturbed near field of a particle resting on a surface. A comparison with numerical computations shows good agreement with the results of our experiments. These results have important consequences for laser-assisted particle removal where field enhancement may cause local surface damage and is one of the physical key processes in this cleaning method. On the other hand, the application of near fields at particles allows structuring of surfaces with structure dimensions in the order of 100 nm and even below.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456827
Show Author Affiliations
H.-J. Muenzer, Univ. Konstanz (Germany)
Mario Mosbacher, Univ. Konstanz and Johannes-Kepler-Univ. (Germany)
M. Bertsch, Univ. Konstanz (Germany)
Oliver Dubbers, Univ. Konstanz (Germany)
F. Burmeister, Fraunhofer Institute for Mechanics of Materials (Germany)
A. Pack, Chemnitz Univ. of Technology (Germany)
Reinhold Wannemacher, Chemnitz Univ. of Technology (Germany)
B.-U. Runge, Univ. Konstanz (Germany)
Dieter Baeuerle, Johannes-Kepler-Univ. (Austria)
Johannes Boneberg, Univ. Konstanz (Switzerland)
Paul Leiderer, Univ. Konstanz (Germany)

Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski, Editor(s)

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