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Proceedings Paper

Peculiarities of steam laser cleaning
Author(s): Vadim P. Veiko; Elena A. Shakhno; Boris V. Volkovyski
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Paper Abstract

The bubble nucleation in liquid laser cleaning is considered. The action of the thermal distribution in the liquid layer at the bubble size, vapor pressure in the bubble and liquid surface tension is investigated. The threshold value of the substrate surface temperature and its dependencies on physical properties of the liquid and surface roughness are defined.

Paper Details

Date Published: 25 February 2002
PDF: 4 pages
Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456824
Show Author Affiliations
Vadim P. Veiko, St. Petersburg Institute of Fine Mechanics (Russia)
Elena A. Shakhno, St. Petersburg Institute of Fine Mechanics (Russia)
Boris V. Volkovyski, St. Petersburg Institute of Fine Mechanics (Russia)


Published in SPIE Proceedings Vol. 4426:
Second International Symposium on Laser Precision Microfabrication

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