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Proceedings Paper

Excimer laser processing for integrated gamma-ray detectors
Author(s): Atsushi Nakamura; Madan Niraula; Koji Asano; Toru Aoki; Yoshinori Hatanaka
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Paper Abstract

Selective operation of laser doping process and laser ablation process using KrF excimer laser irradiation (wavelength 248nm, pulse duration 20ns) was carried out that is used for fabricating an integrated gamma-ray imaging detector. At high vacuumed condition, laser irradiated surface region is heated up to ablated. At high-pressure condition, ablation is suppressed and impurity on the surface was melt and diffuse into the CdTe substrate. We have fabricated an integrated imaging detector using above combination process. The detector showed low leakage current at room temperature and good gamma-ray detection property.

Paper Details

Date Published: 10 January 2003
PDF: 10 pages
Proc. SPIE 4784, X-Ray and Gamma-Ray Detectors and Applications IV, (10 January 2003); doi: 10.1117/12.455779
Show Author Affiliations
Atsushi Nakamura, Shizuoka Univ. (Japan)
Madan Niraula, Nagoya Institute of Technology (Japan)
Koji Asano, Shizuoka Univ. (Japan)
Toru Aoki, Shizuoka Univ. (Japan)
Yoshinori Hatanaka, Shizuoka Univ. (Japan)

Published in SPIE Proceedings Vol. 4784:
X-Ray and Gamma-Ray Detectors and Applications IV
Ralph B. James; Edwin M. Westbrook; Roger D. Durst; Larry A. Franks; Arnold Burger; Edwin M. Westbrook; Roger D. Durst, Editor(s)

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