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Proceedings Paper

Small optical device for measurement of surface roughness
Author(s): Vladimir Ya. Mendeleev; Sergey N. Skovorod'ko; Vladimir N. Porotov; Konstantin Yu. Kim
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Paper Abstract

The device based on the reflectometric method is intended to measure surface roughness parameter Ra by means of comparison of light power reflected from a measured rough surface and light power reflected from standard rough surfaces with known Ra. The light power is measured in the specular direction for the normal incidence. The range of measured Ra is 0.05 - 1.3 micrometers . The device was tested in factory conditions for measurement of surface roughness of a roller during grinding. Values of Ra measured with the device were compared with the values determined with a profilometer. Difference between values Ra measured with the both devices was no more than 10%.

Paper Details

Date Published: 5 February 2002
PDF: 3 pages
Proc. SPIE 4607, Selected Papers from Fifth International Conference on Correlation Optics, (5 February 2002); doi: 10.1117/12.455193
Show Author Affiliations
Vladimir Ya. Mendeleev, Institute for High Temperatures (Russia)
Sergey N. Skovorod'ko, Institute for High Temperatures (Russia)
Vladimir N. Porotov, Moscow Institute of Electronic Technology (Russia)
Konstantin Yu. Kim, Moscow Institute of Electronic Technology (Russia)


Published in SPIE Proceedings Vol. 4607:
Selected Papers from Fifth International Conference on Correlation Optics

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