Share Email Print
cover

Proceedings Paper

Progress on development of prototype laser reference system for stylus profilometry of large optics
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

Paper Details

Date Published: 5 February 2002
PDF: 10 pages
Proc. SPIE 4411, Large Lenses and Prisms, (5 February 2002); doi: 10.1117/12.454885
Show Author Affiliations
Ho-Soon Yang, SaTReC Initiative Co., Ltd. (South Korea)
David D. Walker, Univ. College London (United Kingdom)


Published in SPIE Proceedings Vol. 4411:
Large Lenses and Prisms
Richard G. Bingham; David D. Walker, Editor(s)

© SPIE. Terms of Use
Back to Top