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Proceedings Paper

Progress on development of prototype laser reference system for stylus profilometry of large optics
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Paper Abstract

In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

Paper Details

Date Published: 5 February 2002
PDF: 10 pages
Proc. SPIE 4411, Large Lenses and Prisms, (5 February 2002); doi: 10.1117/12.454885
Show Author Affiliations
Ho-Soon Yang, SaTReC Initiative Co., Ltd. (South Korea)
David D. Walker, Univ. College London (United Kingdom)


Published in SPIE Proceedings Vol. 4411:
Large Lenses and Prisms

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