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Proceedings Paper

Deformable mirrors for high-power lasers
Author(s): Supriyo Sinha; Justin D. Mansell; Robert L. Byer
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Paper Abstract

We describe the performance of a bulk micromachined deformable mirror coated with a dielectric stack for adaptive optics applications with high power lasers. A reflectance of greater than 99.9% was measured and the mirror had a residual static aberration of less than 90 nm rms primarily in astigmatism. A thermally induced distortion of 71 nm RMS was observed for an incident intensity of 300 W/cm2 and an average power of 57 W. The multi-layer coated deformable mirror survived over half a billion cycles without degradation and survived for 30 hours with 36 W cw 1064 nm laser light. In addition, the thermally induced distortion with 22 W of average laser power (350 W/cm2) was reduced from 88 nm to 31 nm rms.

Paper Details

Date Published: 1 February 2002
PDF: 9 pages
Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); doi: 10.1117/12.454728
Show Author Affiliations
Supriyo Sinha, Stanford Univ. (United States)
Justin D. Mansell, Intellite, Inc. (United States)
Robert L. Byer, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 4493:
High-Resolution Wavefront Control: Methods, Devices, and Applications III
John D. Gonglewski; Mikhail A. Vorontsov; Mark T. Gruneisen, Editor(s)

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