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Proceedings Paper

Technology for integrated spatial light modulators based on reflective membranes
Author(s): Serhat Sakarya; Gleb V. Vdovin; Pasqualina M. Sarro
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Paper Abstract

Two approaches toward the fabrication of a spatial light modulator are presented. The first approach uses a pixelated nitride membrane that is suspended by a grid structure over an electrode array. Deformation of each membrane segment is achieved by means of electrostatic attraction. By using a continuous reflective surface, we achieve a 100% optical fill factor. Since we can coat with any metal or combination of materials, these devices can, in principle, handle high optical loads over a wide spectral range. We have tried different spacer materials and dimensions with this approach. In the second approach, the membrane rests on a viscoelastic carrier layer. During fabrication we use the thin nitride membrane to ensure uniformity of the elastic layer after which it is used as an etch stop for the bulk silicon etchant. This type of device is more robust, can use smaller pixel sizes, but has less sensitivity at low voltages. To achieve an optimal, but simple fabrication procedure, the membranes and electronics are fabricated in different processes, ensuring a higher optical quality of the membrane and increasing yield at lower costs. Applications lie in the field of projection displays, optical lithography, optical communication networks, etc.

Paper Details

Date Published: 1 February 2002
PDF: 8 pages
Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); doi: 10.1117/12.454711
Show Author Affiliations
Serhat Sakarya, Delft Univ. of Technology (Netherlands)
Gleb V. Vdovin, Delft Univ. of Technology (Netherlands)
Pasqualina M. Sarro, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 4493:
High-Resolution Wavefront Control: Methods, Devices, and Applications III
John D. Gonglewski; Mikhail A. Vorontsov; Mark T. Gruneisen, Editor(s)

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