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Proceedings Paper

Manufacturing of an optical-quality mirror system for adaptive optics
Author(s): Julie A. Perreault; Paul A. Bierden; Mark N. Horenstein; Thomas G. Bifano
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Paper Abstract

Manufacturing of optical quality micromachined deformable mirrors for use in adaptive optic (AO) correction is described. Several non-standard manufacturing techniques have been developed to improve optical quality of surface micromachined mirrors. Two challenges to manufacturing optical quality micromachined mirrors are reducing surface roughness and increasing reflectivity. A chemo-mechanical polishing process has been used to improve surface quality of the mirrors, and a gold coating process has been developed to improve the reflectivity without introducing a significant amount of stress in the mirror membrane. Surface reflectivity and topography measurements of optically flat and smooth mirrors are presented. Based on these results, a new 1024 actuator mirror has been designed and is currently being fabricated. Design considerations and performance expectations for this mirror will be presented.

Paper Details

Date Published: 1 February 2002
PDF: 8 pages
Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); doi: 10.1117/12.454703
Show Author Affiliations
Julie A. Perreault, Boston Univ. (United States)
Paul A. Bierden, Boston Micromachines Corp. (United States)
Mark N. Horenstein, Boston Univ. (United States)
Thomas G. Bifano, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 4493:
High-Resolution Wavefront Control: Methods, Devices, and Applications III
John D. Gonglewski; Mikhail A. Vorontsov; Mark T. Gruneisen, Editor(s)

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