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Proceedings Paper

Nanofabrication processes for single-ion implantation of silicon quantum computer devices
Author(s): Rita P. McKinnon; Fay E. Stanley; Tilo Markus Buehler; Eric Gauja; Katia Peceros; Linda D. Macks; Mladen Mitic; Victor Chan; Andrew S. Dzurak; Robert G. Clark; Changyi Yang; David N. Jamieson; Steven D. Prawer
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Paper Abstract

We describe progress in a range of nanofabrication processes for the production of silicon-based quantum computer devices. The processes are based upon single-ion implantation to place phosphorus-31 atoms in accurate locations, precisely self-aligned to metal control gates. These fabrication schemes involve multi-layer resist and metal structures, electron beam lithography and multi-angled aluminium shadow evaporation. The key feature of all fabrication schemes is a gate pattern defined in a resist structure using electron beam lithography, used in conjunction with a second pattern written in another resist layer. The locations where the two patterns overlap define channels down to the substrate through which ions can be implanted, with the remaining metal/resist structure behaving as a mask. Further processing on the resist structures allows for deposition of the control gates and read-out structures. Central to this process is a new technique which allows for control of the implantation process at a single-ion level.

Paper Details

Date Published: 19 November 2001
PDF: 9 pages
Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); doi: 10.1117/12.454618
Show Author Affiliations
Rita P. McKinnon, Univ. of New South Wales (Australia)
Fay E. Stanley, Univ. of New South Wales (Australia)
Tilo Markus Buehler, Univ. of New South Wales (Australia)
Eric Gauja, Univ. of New South Wales (Australia)
Katia Peceros, Univ. of New South Wales (Australia)
Linda D. Macks, Univ. of New South Wales (Australia)
Mladen Mitic, Univ. of New South Wales (Australia)
Victor Chan, Univ. of New South Wales (Australia)
Andrew S. Dzurak, Univ. of New South Wales (Australia)
Robert G. Clark, Univ. of New South Wales (Australia)
Changyi Yang, Univ. of New South Wales and Univ. of Melbourne (Australia)
David N. Jamieson, Univ. of New South Wales and Univ. of Melbourne (Australia)
Steven D. Prawer, Univ. of New South Wales and Univ. of Melbourne (Australia)

Published in SPIE Proceedings Vol. 4590:
BioMEMS and Smart Nanostructures
Laszlo B. Kish; Erol C. Harvey; William B. Spillman Jr., Editor(s)

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