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Proceedings Paper

Investigation of MoO3-WO3 thin film microstructure for gas sensing applications
Author(s): Kosmas Galatsis; Muralihar K. Ghantasala; Yongxiang Li; Kourosh Kalantar-Zadeh; Adrian Trinchi; Wojtek Wlodarski; A. Taurino; Pietro Siciliano; Lara Cukrov
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Paper Abstract

MoO3-WO3 thin films have been fabricated via the sol-gel method. FESEM, TEM, RBS and SIMS analysis techniques have been employed to analyse the films and material properties for use as gas sensors to detect CO and NO2. FESEM shows the film made up of segregated molybdenum crystals. TEM highlights the nano-sized grains sructure and crystallinity. RBS analysis confirmed the films are stoichimetric and that the Mo component of the system decreases as the annealing temperature is increased. SIMS illustrates the interesting elemental depth profiles of the films. The films were exposed to CO and NO2. MoO3-WO3 shows better NO2 sensitivity and selectivity compared to its single metal oxide constituents.

Paper Details

Date Published: 19 November 2001
PDF: 8 pages
Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); doi: 10.1117/12.454610
Show Author Affiliations
Kosmas Galatsis, Royal Melbourne Institute of Technology and CRC for Microtechnology (Australia)
Muralihar K. Ghantasala, CRC for Microtechnology and Swinburne Univ. of Technology (Australia)
Yongxiang Li, Royal Melbourne Institute of Technology and CRC for Microtechnology (Australia)
Kourosh Kalantar-Zadeh, Royal Melbourne Institute of Technology and CRC for Microtechnology (Australia)
Adrian Trinchi, Royal Melbourne Institute of Technology and CRC for Microtechnology (Australia)
Wojtek Wlodarski, Royal Melbourne Institute of Technology and CRC for Microtechnology (Australia)
A. Taurino, CNR-IME (Italy)
Pietro Siciliano, CNR-IME (Italy)
Lara Cukrov, Univ. of Western Australia (Australia)


Published in SPIE Proceedings Vol. 4590:
BioMEMS and Smart Nanostructures
Laszlo B. Kish; Erol C. Harvey; William B. Spillman, Editor(s)

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