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Proceedings Paper

Cellular-automata-based modeling of the electrostatic self-assembly (ESA) fabrication process
Author(s): William B. Spillman; Tingying Zeng; Richard O. Claus
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Paper Abstract

The electo-static self-assembly process (ESA) has proved to be extremely successful in creating multi-layer coatings with properties that can be tailored for particular applications. In this process, almost any surface with charged functional groups can be used as a substrate. Alternate dipping in solutions having ions of opposite charge builds up the layers through ionic bonding. One particular application of this process could be to form multi-functional bio-compatible coatings on MEMS devices intended for use in-vivo. In this paper, we describe two different models of the process based on cellular automata. The output of the models consists of three parameters as a function of layer: ionic coverage, film height and film roughness. The results of the models are compared to experimental data to determine which of them more accurately describes the ESA process.

Paper Details

Date Published: 19 November 2001
PDF: 11 pages
Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); doi: 10.1117/12.454599
Show Author Affiliations
William B. Spillman, Virginia Polytechnic Institute and State Univ. (United States)
Tingying Zeng, Virginia Polytechnic Institute and State Univ. (United States)
Richard O. Claus, Virginia Polytechnic Institute and State Univ. (United States)


Published in SPIE Proceedings Vol. 4590:
BioMEMS and Smart Nanostructures
Laszlo B. Kish; Erol C. Harvey; William B. Spillman, Editor(s)

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