Share Email Print
cover

Proceedings Paper

Aspheric surface fabrication in nanometer-level accuracy by numerically controlled plasma chemical vaporization machining (CVM) and elastic emission machining (EEM)
Author(s): Kazuya Yamamura; Hidekazu Mimura; Kazuto Yamauchi; Yasuhisa Sano; Akira Saito; Takehiko Kinoshita; Katsuyoshi Endo; Yuzo Mori; Alexei Souvorov; Makina Yabashi; Kenji Tamasaku; Tetsuya Ishikawa
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We established an efficient ultra-precision figuring process in which a numerically controlled plasma chemical vaporization machining (NC-PCVM) and a numerically controlled elastic emission machining (NC-EEM) are utilized serially. Intensity images of the X-rays reflected by total reflection mirrors greatly fluctuates with respect to the figure error having spatial wavelength ranging from the submillimeter to 10mm. In the present study, elliptical mirrors for the Kirkpatrick-Baez (K-B) focusing unit was manufactured by NC-PCVM and NC-EEM, and figure accuracy higher than 3nm (p-v) was achieved over the spatial wavelength range longer than 0.5mm. The focusing property was evaluated at the BL29XUL of SPring-8, and spot size of 0.2×0.2 μm2 (FWHM) was realized at 15keV.

Paper Details

Date Published: 24 December 2002
PDF: 6 pages
Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); doi: 10.1117/12.453749
Show Author Affiliations
Kazuya Yamamura, Osaka Univ. (Japan)
Hidekazu Mimura, Osaka Univ. (Japan)
Kazuto Yamauchi, Osaka Univ. (Japan)
Yasuhisa Sano, Osaka Univ. (Japan)
Akira Saito, Osaka Univ. (Japan)
Takehiko Kinoshita, Osaka Univ. (Japan)
Katsuyoshi Endo, Osaka Univ. (Japan)
Yuzo Mori, Osaka Univ. (Japan)
Alexei Souvorov, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
Makina Yabashi, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
Kenji Tamasaku, SPring-8/RIKEN (Japan)
Tetsuya Ishikawa, SPring-8/RIKEN (Japan)


Published in SPIE Proceedings Vol. 4782:
X-Ray Mirrors, Crystals, and Multilayers II
Andreas K. Freund; Albert T. Macrander; Tetsuya Ishikawa; James L. Wood, Editor(s)

© SPIE. Terms of Use
Back to Top