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Proceedings Paper

Recent advances in optical MEMS devices and systems
Author(s): Pamela Rae Patterson; Dooyoung Hah; Mark M. C. Lee; Jui Che Tsai; Ming C. Wu
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Paper Abstract

We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scanning micromirror for imaging applications, an analog micromirror array for network switching applications, and a nanoscale photonic crystal switch for integrated photonic circuit applications will be described.

Paper Details

Date Published: 15 November 2002
PDF: 8 pages
Proc. SPIE 4788, Photonic Devices and Algorithms for Computing IV, (15 November 2002); doi: 10.1117/12.453712
Show Author Affiliations
Pamela Rae Patterson, Univ. of California/Los Angeles (United States)
Dooyoung Hah, Univ. of California/Los Angeles (United States)
Mark M. C. Lee, Univ. of California/Los Angeles (United States)
Jui Che Tsai, Univ. of California/Los Angeles (United States)
Ming C. Wu, Univ. of California/Los Angeles (United States)


Published in SPIE Proceedings Vol. 4788:
Photonic Devices and Algorithms for Computing IV
Khan M. Iftekharuddin; Abdul Ahad S. Awwal, Editor(s)

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