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Proceedings Paper

High-precision 2D angle measurement using fringe analysis techniques
Author(s): Zongtao Ge; Takayuki Saito; Shinichi Matsuda; Mitsuo Takeda
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Paper Abstract

In this paper, a novel angle measurement method using the fringe analysis techniques is proposed. In this method, a 2D surface profile including a tilt is obtained by fringe analysis, and the tilt in the 2D surface profile is determined by fitting the obtained surface profile with a plane. From the fitted plane, 2D angles can be easily obtained. Simulations using the Fourier transform and phase- shift methods are performed, and the results are compared with each other. Simulations show that 2D angle measurement using the fringe analysis techniques can achieve simultaneously a wide measurement range and high precision.

Paper Details

Date Published: 27 December 2001
PDF: 10 pages
Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); doi: 10.1117/12.453643
Show Author Affiliations
Zongtao Ge, Fuji Photo Optical Co., Ltd. (Japan)
Takayuki Saito, Fuji Photo Optical Co., Ltd. (Japan)
Shinichi Matsuda, Fuji Photo Optical Co., Ltd. (Japan)
Mitsuo Takeda, Univ. of Electro-Communications (Japan)


Published in SPIE Proceedings Vol. 4451:
Optical Manufacturing and Testing IV
H. Philip Stahl, Editor(s)

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