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Proceedings Paper

Multiple-surface phase-shifting interferometry
Author(s): Leslie L. Deck
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Paper Abstract

I show how phase shifting interferometry can be extended to account for multiple interference effects using a Fourier based analysis technique combined with wavelength tuning and a particular four-surface interferometer geometry. The technique is demonstrated by simultaneously measuring both surface profiles, the optical thickness variation and index homogeneity of a parallel plate. In addition, unlike traditional phase shifting techniques, the linear component of the homogeneity can be measured with high precision. It is shown that a significant linear component exists in a commercially supplied flat.

Paper Details

Date Published: 27 December 2001
PDF: 8 pages
Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); doi: 10.1117/12.453640
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 4451:
Optical Manufacturing and Testing IV
H. Philip Stahl, Editor(s)

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