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Proceedings Paper

Fabrication of integrated diffractive micro-optics for MEMS applications
Author(s): Larry R. Senesac; R. H. Farahi; James L. Corbeil; Dennis Duncan Earl; Slobodan Rajic; Panos G. Datskos
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Paper Abstract

We investigated the fabrication of integrated diffractive micro-optical features on MEMS structures for the purpose of motion detection. The process of producing the diffractive features and the MEMS structures by focused ion beam milling is described in detail, as is the ion beam sputtering process used to produce coatings on these structures. The diffractive features of the circular Fresnel zone plate (FZP) and spiral FZP were fabricated on MEMS structures and the relevant diffraction theory is discussed. The spiral FZP diffractive features produced well defined foci whose intensity varies with distance from the FZP. Observation of these intensity variations enable us to detect the motion of the MEMS structure, and the resulting device was used to scan an IR image of a hot object.

Paper Details

Date Published: 27 December 2001
PDF: 11 pages
Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); doi: 10.1117/12.453628
Show Author Affiliations
Larry R. Senesac, Univ. of Tennessee (United States)
R. H. Farahi, Oak Ridge National Lab. (United States)
James L. Corbeil, Oak Ridge National Lab. (United States)
Dennis Duncan Earl, Oak Ridge National Lab. (United States)
Slobodan Rajic, Oak Ridge National Lab. (United States)
Panos G. Datskos, Oak Ridge National Lab. (United States)

Published in SPIE Proceedings Vol. 4451:
Optical Manufacturing and Testing IV
H. Philip Stahl, Editor(s)

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