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Proceedings Paper

Nanometer accurate shaping with fluid jet polishing
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Paper Abstract

This article describes the Fluid Jet Polishing process. An overview of the theoretical dependence of various important parameters is given. We discuss some results obtained with FJP, including typical material removal rates and roughness values. Some recent experiments are described that show that it is also possible to obtain removal rates as small as one nanometer per minute for glass surfaces. Specific surface profiles are created, both with and without the use of surface protecting masks.

Paper Details

Date Published: 27 December 2001
PDF: 11 pages
Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); doi: 10.1117/12.453620
Show Author Affiliations
Silvia M. Booij, Delft Univ. of Technology (Netherlands)
Hedser H. van Brug, Delft Univ. of Technology (Netherlands)
Mandeep Singh, Delft Univ. of Technology (Canada)
Joseph J. M. Braat, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 4451:
Optical Manufacturing and Testing IV
H. Philip Stahl, Editor(s)

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