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Proceedings Paper

AFM length analysis of data marks: measuring jitter, asymmetry, process noise, and process position
Author(s): Donald A. Chernoff; David L. Burkhead
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Paper Abstract

We describe statistical analysis of AFM measurements of bump size, shape and position on DVD stampers. We present statistical concepts that lead to useful measurements of process position and process noise. These physical measurements are compared with key electrical measurements such as asymmetry and jitter.

Paper Details

Date Published: 10 January 2002
PDF: 9 pages
Proc. SPIE 4342, Optical Data Storage 2001, (10 January 2002); doi: 10.1117/12.453421
Show Author Affiliations
Donald A. Chernoff, Advanced Surface Microscopy, Inc. (United States)
David L. Burkhead, Advanced Surface Microscopy, Inc. (United States)


Published in SPIE Proceedings Vol. 4342:
Optical Data Storage 2001

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